Silane | Silanes | Alkyl Silanes | Developmental

SiSiB® PC5401

Synonym: Tetramethylsilane

Chemical Structure


SiSiB® organosilanes basic structure is RnSi(OR)4-n, wherein "R" is an alkyl, aryl, or other organofunctional group and "OR" is a methoxy, ethoxy, or acetoxy group.

Typical Physical Properties

Chemical Name: Tetramethylsilane
CAS No.: 75-76-3
EINECS No.: 200-899-1
Empirical Formula: C4H12Si
Molecular Weight: 88.22
Boiling Point: 26.6°C [760mmHg]
Flash Point: -28°C
Color and Appearance: Colorless clear liquid
Density [25°C]: 0.641
Refractive Index [25°C]: 1.3588[25°C]
Purity: 98% by GC


SiSiB® PC5401 is used for PECVD of low k dielectric and barrier layers in damascene metallization applications.


Net weight 120Kg steel drum, for more details, please visit Packing Centre.

Technical Library

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